The above object of the present invention is achieved by a metal diaphragm valve constructed as follows. The metal diaphragm valve comprises a valve cage, a metallic valve seat integral with the valve cage, a metal diaphragm having a peripheral edge portion supported in a fluid-tight manner by the valve cage and a central portion facing the valve seat to touch and leave the seat,

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High flow diaphragm valve

A valve housing

Actuate a diaphragm

Diaphragm valves to selectively

a drive means for opening and closing the metal diaphragm, and diaphragm pressing means, interposed between the drive member and the metal diaphragm, for pressing the diaphragm against the valve seat at a uniform sealing pressure.

According to the present invention arranged in this manner, even if there are some shifts or skews of the positions of the points of action and the directions of push forces acting on the metal diaphragm,Needle Valves when the diaphragm is pressed against the valve seat by means of the drive member for valve operation, and if the diaphragm and the valve seat are formed of metal which cannot easily expand or contract, resulting misalignments can be absorbed or compensated by the diaphragm pressing means, and the sealing pressure at the diaphragm can be uniformly distributed with respect to the circumferential direction.Needle & Gauge Valves Thus, the leakage rate can be kept at 10 -11 torr